Multi-time Scale Control of Dual-Stage Nanopositioning Systems
نویسندگان
چکیده
منابع مشابه
Range-based control of dual-stage nanopositioning systems.
A novel dual-stage nanopositioner control framework is presented that considers range constraints. Dual-stage nanopositioners are becoming increasingly popular in applications such as scanning probe microscopy due to their unique ability to achieve long-range and high-speed operation. The proposed control approach addresses the issue that some precision positioning trajectories are not achievab...
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The positioning performance of piezo-based nanopositioning systems is limited by dynamic and hysteresis effects in the piezoactuator. Herein, a high-performance, dual-stage repetitive controller (dual-RC) with a feedforward hysteresis compensator is proposed for tracking periodic trajectories, such as the scanning-type motion, in nanopositioning systems. Firstly, a discrete-time dual-RC is crea...
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ژورنال
عنوان ژورنال: IFAC-PapersOnLine
سال: 2020
ISSN: 2405-8963
DOI: 10.1016/j.ifacol.2020.12.502